Simulations and Experiment Analysis of a Piezoelectric Micropump


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The application of micropump in microanalytical reagent is widely. In this paper a piezoelectric micropump model that looks like a sandwitch has been put forward. The main structures of the micropump include inlet and outlet pipe, silicon substrate pump body, piezoelectric transducer. In order to find the excellent driving performance, the modals and piezoelectric-stress coupling analysis of the piezoelectric transducer has been carried out with finite element analysis methods. The result proves that the optimal working condition of the micropump is the 1st mode. Finally the micropump model has been fabricated with silicon deep reactive ion etching and UV irreversible irradiation. Through experiment the flow rate and pressure of the micropump reach the maximum in first-order modal that is less than 1000 Hz, and this is accord with the modal analysis.



Edited by:

Mohamed Othman




Y. F. Guan et al., "Simulations and Experiment Analysis of a Piezoelectric Micropump", Applied Mechanics and Materials, Vols. 229-231, pp. 1688-1692, 2012

Online since:

November 2012




[1] Anders Olsson, Goran Stemme and Erik Stemme. Simulation Studies of diffuser and nozzle elements for valve-less micropumps [J]. 1997 International Conference on Solid-State Sensors and Actuators, Transducers' 97, pp.1039-1042.


[2] C. Yamahata, C. Lotto, E. Al-Assaf. A PMMA valveless micropump using electromagnetic actuation, Microfluid Nanofluid 1, (2005), pp.197-207.


[3] O. Macchion, N. Lior, A. Rizzi. Computational study of velocity distribution and pressure drop for designing some gas quench chamber and furnace ducts [J]. Journal of Materials Processing Technology 155-156, (2004), pp.1727-1733.


[5] A. T. Al-Halhouli, M. I. Kilani, A. Al-Salaymeh. Investigation of the influence of design parameters on the flow performance of single and double disk viscous micropumps [J]. Microsyst Technol, vol. 13 (2007) , pp.677-687.


[6] Chia-Yen Lee, Zeen-Hui Chen. Valveless impedance micropump with integrated magnetic diaphragm [J]. Biomed Microdevices, vol 12 (2010), pp.197-205.


[7] A Azarbadegan, I Eames, A Wojcik. Fluid-structure coupling in valveless micropumps [J]. J. Micromech. Microeng, vol 21 (2011), pp.1-9.


[8] BAI Lan, FENG Zhiqing, WU Yihui. Solid-liquid coupling analysis of valveless micropumps dynamic characteristics[J]. Chinese journal of mechanical engineering, vol 44(7) (20080), pp.69-74. (in Chinese).


[9] B Fan, G Song, F Hussain. Simulation of a piezoelectrically actuated valveless micropump [J]. Smart materials and structures, vol 14 (2005), pp.400-405.


[10] Xie Haibo, Fu Xin, Liu Ling, Yang Huayong. Research on glass wet etching for micro fluidic devices [J]. Chinese Journal of Mechanical Engineering, 2003, vol 39(11) (2003), pp.123-129.


[11] Xiaofeng Qu, Fuming Sang, Jicun Ren. Fabrication of PDMS/glass microchips by twofold replication of PDMS and its application in genetic analysis [J]. J. Sep. Sci. vol 29 (2006), pp.2390-2394.