Design, Simulation and Optimization of Electrothermal Micro Actuator
This work presents the design and optimization of out of plane electrothermal MEMS actuators. The proposed concept is capable of generating large out of plane displacement at low driving power and a low actuation temperature. The performance of this actuator is evaluated and simulated in ANSYS. The out of plane displacement of 291µm at a temperature increase of 135°C from ambient has been achieved with the applied power of 2.7mW(0.7V). Moreover, a thermal time constant of 5.6ms and a frequency of 85Hz is accomplished for this actuator.
A. Ali et al., "Design, Simulation and Optimization of Electrothermal Micro Actuator", Applied Mechanics and Materials, Vols. 229-231, pp. 1939-1943, 2012