Design of a MEMS Temperature Difference Suspended Structure Gas Flowmeter

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A micro flowmeter was designed based on MEMS sensor and weak signal acquisition technique. The MEMS sensor adopted VO2 thermal resistor suspended structure, which has good heat isolation performance and high sensitivity. The flow channel was made up of SU-8 gum, and this technology is simple and suitable for batch production because of low cost. The following weak signal acquisition module used super low bias current operational amplifier, aided with Guard ring protection, and 24 bit high resolution ADC to realize high resolution, low noise data acquisition through reasonable layout and ground design. The experiment shows that the entire flowmeter has favorable linearity and sensitivity in the velocity range from 0 to 30mL/min at a certain suitable offset voltage. So it can satisfy the applications in the fields such as biochemical detection, medicine and so on.

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Periodical:

Edited by:

Huawu Liu, Yongxin Yang, Shijie Shen, Zhili Zhong, Laijiu Zheng and Peng Feng

Pages:

1548-1552

DOI:

10.4028/www.scientific.net/AMM.268-270.1548

Citation:

H. Li "Design of a MEMS Temperature Difference Suspended Structure Gas Flowmeter", Applied Mechanics and Materials, Vols. 268-270, pp. 1548-1552, 2013

Online since:

December 2012

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$38.00

[1] Jiegang Peng, Zhaoying Zhou. Progresses on micro machined flow sensors based on MEMS technologies[J]. mechanics Progress, 2005(35), 3: 361-376, In Chinese.

[2] Lofdahl L. MEMS application in turbulence and flow control[J]. Process in Aerospace Science, 1999, 35: 101-103.

[3] Xuanyi Duan, Haibo Xie. Design of a micro thermal liquid flow sensor[J]. Sensor Technology, 2005, 24(8): 83-85, In Chinese.

[4] Nguyen N T, Dotzel W. Asymmetrical locations of heaters and sensors relative to each other using heater array: a novel method for designing multi-range electrocaloric mass-flow sensors[J]. Sensors and Actuators A, 1997, 62: 506-512.

DOI: 10.1016/s0924-4247(97)01529-x

[5] Lixia Wang, Jianping Li. Fabrication of Vanadium Dioxide Films at Low Temperature and Researches on Properties of the Films, 2006 Acta. Phys. 55(6): 2846-2851, In Chinese.

[6] National Semiconductor Corporation. 3 Femtoampere Input Bias Current Precision Amplifier LMP7721[R]. http: /www. national. com, (2008).

[7] Jianming Zheng, Lihua Huang. Formation and Guarding of Leakage Current[J]. Aerospace manufacturing Technology, 2006, (4): 86-89, In Chinese.

[8] Burr-Brown Corporation. 24-Bit ANALOG-TO-DIGITAL CONVERTER ADS1211[R]. http: /www. burr-brown. com, (2007).

[9] Montrose Mark I. Printed Circuit Board Design Techniques for EMC[M]. Hoboken, New Jersey, USA: Wiley-IEEE Press, (2010).

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