Analysis of the Diffusion Effect of a New Continuous Diffusion Furnace
A new continuous diffusion furnace is introduced in this paper and its workflow is briefly discussed. Within the analysis and statement about the diffusion principle, both junction depth and sheet resistivity are studied. Numerical analysis has been performed to simulate the temperature distribution in the furnace, with FLUENT software. Finally the values of sheet resistivity are calculated according to both temperature field models of continuous and traditional diffusion furnace respectively. Therefore, the new continuous diffusion furnace is proved to be feasible by the comparison of these values.
Xiaochun Tang, Xiaohong Chen, Yuxiang Dong, Xiuguo Wei and Qingsheng Yang
R. L. Chen et al., "Analysis of the Diffusion Effect of a New Continuous Diffusion Furnace", Applied Mechanics and Materials, Vols. 291-294, pp. 115-120, 2013