Micro CO2 Sensor Based on Li2CO3, Pt | Li3PO4 | Pt, Li2TiO3-TiO2 Structure

Abstract:

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This paper presents a micro solid electrolyte CO2 gas sensor in which Li2CO3, Li2TiO3-TiO2 serves as sensing and reference electrodes respectively, and the Li3PO4 film acts as the electrolyte. The sensor was constructed in the sequent layers of O2, CO2, Li2CO3, Pt | Li3PO4 | Pt, Li2TiO3-TiO2, O2, CO2 on the Al2O3 substrate by MEMS process. Experimental results indicate that the micro solid-electrolyte CO2 gas sensor has a relatively rapid speed of response. By discussions, we may find that the improved performance will be realized by optimizing the primary parameters of the sensor.

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Periodical:

Edited by:

Ran Chen

Pages:

2747-2751

DOI:

10.4028/www.scientific.net/AMM.44-47.2747

Citation:

H. R. Wang et al., "Micro CO2 Sensor Based on Li2CO3, Pt | Li3PO4 | Pt, Li2TiO3-TiO2 Structure", Applied Mechanics and Materials, Vols. 44-47, pp. 2747-2751, 2011

Online since:

December 2010

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$38.00

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