Micro CO2 Sensor Based on Li2CO3, Pt | Li3PO4 | Pt, Li2TiO3-TiO2 Structure
This paper presents a micro solid electrolyte CO2 gas sensor in which Li2CO3, Li2TiO3-TiO2 serves as sensing and reference electrodes respectively, and the Li3PO4 film acts as the electrolyte. The sensor was constructed in the sequent layers of O2, CO2, Li2CO3, Pt | Li3PO4 | Pt, Li2TiO3-TiO2, O2, CO2 on the Al2O3 substrate by MEMS process. Experimental results indicate that the micro solid-electrolyte CO2 gas sensor has a relatively rapid speed of response. By discussions, we may find that the improved performance will be realized by optimizing the primary parameters of the sensor.
H. R. Wang et al., "Micro CO2 Sensor Based on Li2CO3, Pt | Li3PO4 | Pt, Li2TiO3-TiO2 Structure", Applied Mechanics and Materials, Vols. 44-47, pp. 2747-2751, 2011