Analysis of Bridge-Type Nano-Positioning Stage
A piezoelectric nanostage using bridge-type flexure hinge mechanisms is developed. Elastic beam theory was used to analyze the ideal and theoretic displacement amplification ratio and find that their value is mainly influenced by the length of the tilt rod and tilt angle of bridge-type. A multilayer S-type hinge is designed as the prismatic of moving platform. Stiffness and natural frequency model of the whole stage is built and find out that their value is mainly relevant to hinge thickness, tilt angle of bridge-type hinge and length of S-type hinge. Finally, finite element method (FEM) is used to verify the drived model. The errors of the total stiffness and the natural frequency of the stage between FEM and theory analysis are 3.8% and 6.6% respectively, which confirm the predictions of theory analysis.
L. Ma et al., "Analysis of Bridge-Type Nano-Positioning Stage", Applied Mechanics and Materials, Vols. 44-47, pp. 3828-3832, 2011