Modeling, Fabrication and Characterization of Piezoelectric ZnO-Based Micro-Sensors and Micro-Actuators
In this study, capabilities of zinc oxide (ZnO) thin films in sensing and actuating were investigated using micromachined micro-cantilevers. A heterogeneous piezoelectric cantilever was modeled to study its response under voltage and/or external mechanical loading. A ZnO thin-film micro-cantilever was designed based on the developed theoretical model. Simulated tip deflections of the micro-cantilever were on the nanometer level under typical electrical and mechanical input. A prototype was fabricated with microfabrication techniques. The ZnO thin film was sputtered at room temperature and demonstrated good compatibility with common chemicals and processes in micromachining. The fabricated micro-cantilever was experimentally characterized for its actuating and sensing performance. For actuator characterization tip deflection of the micro-cantilever was detected by a laser Doppler vibrometer, while for sensor characterization the micro-cantilever was calibrated as an acceleration sensor using a reference accelerometer. The experimental resonant frequency, actuating and sensing sensitivities agreed well the design specifications.
Guo Ran, Zeng Yun, Zhang Jianming, Yang Yang, Li Ze and Guo Tao
Y. H. Yuan et al., "Modeling, Fabrication and Characterization of Piezoelectric ZnO-Based Micro-Sensors and Micro-Actuators", Applied Mechanics and Materials, Vols. 444-445, pp. 1636-1643, 2014