Varistor Characteristic Analysis of the Piezoresistive Sensors
In the process of the piezoresistive sensor design, the placement of varistor has a great influence on the sensitivity of the sensor.In this paper, three theoretical models of piezoresistive sensor are established.The stress simulation analysis of the different varistor path way placed on the cantilever beam is conducted in Ansys software. The sensitivities of the axis and transverse direction are calcuated and compared by Matlab compiler. The results show that the placement of varistor which is parallel to the cantilever beam is the most optimal choice.
J. Shao and Y.Q. Zhang
Y. B. Shi and X. Li, "Varistor Characteristic Analysis of the Piezoresistive Sensors", Applied Mechanics and Materials, Vols. 494-495, pp. 997-1000, 2014