A FEM Model to Analyze the Structural Mechanical Problem in an Electrostatically Controlled Prestressed Micro-Mirror
In many industrial and biomedical applications (laser scanning displays, optical switch matrices and biomedical imaging systems) the sensing and actuation components are realized using micro-mirrors fabricated by MEMS technology. In this paper is evaluated, through numerical methods, the structural mechanical properties of the actuation mechanism of a ring shape micro-mirror. For the lift-off of the structure there are used four springs simulating a prestressed cantilever beam.
D. Popovici et al., "A FEM Model to Analyze the Structural Mechanical Problem in an Electrostatically Controlled Prestressed Micro-Mirror", Applied Mechanics and Materials, Vol. 61, pp. 9-14, 2011