A FEM Model to Analyze the Structural Mechanical Problem in an Electrostatically Controlled Prestressed Micro-Mirror

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In many industrial and biomedical applications (laser scanning displays, optical switch matrices and biomedical imaging systems) the sensing and actuation components are realized using micro-mirrors fabricated by MEMS technology. In this paper is evaluated, through numerical methods, the structural mechanical properties of the actuation mechanism of a ring shape micro-mirror. For the lift-off of the structure there are used four springs simulating a prestressed cantilever beam.

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Periodical:

Edited by:

Moussa Karama

Pages:

9-14

Citation:

D. Popovici et al., "A FEM Model to Analyze the Structural Mechanical Problem in an Electrostatically Controlled Prestressed Micro-Mirror", Applied Mechanics and Materials, Vol. 61, pp. 9-14, 2011

Online since:

June 2011

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$41.00

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