Characteristic Analysis on Transverse Comb Structure Using PSpice


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An analysis of transverse comb structure based MEMS accelerometer is carried out. Its static and dynamic behavior is analyzed by employing a simple electrical equivalent circuit in the acceleration range of 0-30g. The device is simulated for dc, transient and frequency conditions. In the transient analysis, the device is excited with sinusoidal and step input acceleration and the proof mass displacement is evaluated. It is found that, the capacitance and displacement values obtained from our simulation matches well with reports from ANSYS Workbench®. The maximum displacement in the structure is evaluated at different condition and the effect of damping is investigated.



Edited by:

Bale V. Reddy, Shishir Kumar Sahu, A. Kandasamy and Manuel de La Sen




C. Kavitha and M. Ganesh Madhan, "Characteristic Analysis on Transverse Comb Structure Using PSpice", Applied Mechanics and Materials, Vol. 627, pp. 202-206, 2014

Online since:

September 2014




[1] Tai Ran Hsu, MEMS & Microsystems Design and Manufacture, Tata McGraw-Hill Education, (2002).

[2] F. J. Ibarra-Villegas, S. Ortega-Cisneros, F. Sandoval-Ibarra, Design of capacitive MEMS transverse-comb accelerometers with test hardware, Superficies y Vacío 26(1) 4-12, marzo de (2013).

[3] B. D. Pant, Lokesh Dhakar, P. J. George and S. Ahmad, Design of a MEMS Capacitive Comb-drive Micro-accelerometer with Sag Optimization, Sensors & Transducers Journal, Vol. 108, Issue 9, September 2009, pp.15-30.

[4] Liu Xiaowei, Chen Hong, Chen Weiping, System Damping Ratio Analysis of a Capacitive Micromechanical Accelerometer, IEEE, 6th International Conference on Electronic Packaging Technology, 2005, pp.1-4.


[5] B. A. Ganji,A. Mousavi, Accurate Determination of Pull-in Voltage for MEMS Capacitive Devices with Clamped Square Diaphragm, International Journal of Engineering Transactions B: Applications, Vol. 25, Issue 3, 2012, pp.161-166.


[6] Timo Veijola, Heikki Kuisma, Juha Lahdenperä, Tapani Ryhänen, Equivalent-circuit model of the squeezed gas film in a silicon accelerometer, Sensor and Actuator A-Physics, Vol. 48, Issue 3, 1995, pp.239-248.


[7] Kavitha C, Ganesh Madhan M, An Improved SPICE model for MEMS based Capacitive Accelerometers, Journal of Nano-and Electronic Physics. Vol. 5, Issue 2, 2013, p.02011.