The Study on the Ultrasonic Nanomachining of Au/Ti Thin Film by Atomic Force Microscopy


Article Preview

This study focused on the ultrasonic nanomachining by atomic force microscopy (AFM) to understand the phenomena of the ultrasonic nanomachining. The workpiece is an Au/Ti thin film and coated on the quartz crystal resonator (QCR). The ultrasound vibration of workpiece is carried out by used the Quartz crystal microbalance (QCM). And a normal force measurement model was built by force curve measurements in ultrasound vibration environment. The influence of different experimental parameters can be studied such as normal force and repeat number on the cutting depth and chip stacking. After the experiments, it can be found that the ultrasonic nanomachining by AFM is possessed great influence on the cutting depth.



Edited by:

Bale V. Reddy, Shishir Kumar Sahu, A. Kandasamy and Manuel de La Sen




J. C. Huang et al., "The Study on the Ultrasonic Nanomachining of Au/Ti Thin Film by Atomic Force Microscopy", Applied Mechanics and Materials, Vol. 627, pp. 35-39, 2014

Online since:

September 2014




* - Corresponding Author

[1] G. Binnig, H. Rohrer, Ch. Gerber, E. Weibel, Phys. Rev. Lett. 49 (1982) 57-61.


[2] J.C. Huang, Y.J. Weng, S.Y. Yang, Y.C. Weng, and J. Y. Wang, Fabricating Nanostructure by Atomic Force Microscopy, Japanese Journal of Applied Physics. 48 (2009) 095001-1- 095001-5.


[3] J.C. Huang, Y.J. Weng and J.W. Lee, Evaluation of the Nanofabrication and Corrosion on Copper by In-situ ECAFM, J. Chinese Society of Mechanical Engineers. 32 (2011) 61-66.

[4] C.B. Yang, H.L. Chiang, J.C. Huang, Study on Advanced Nano-Scale Near field photolithography, Scanning. 32 (2010) 351–360.


[5] J.C. Huang, Fabricating nanostructures through a combination of nano-oxidation and wet etching on the different surface conditions of silicon wafer, Scanning. 34 (2012) 264-270.


[6] J.C. Huang, J.W. Lee, C.L. Li, Nano-scratching and nano-machining in different environments on Cr2N/Cu multilayer thin films, Thin Solid Films. 519 (2011) 4992–4996.

[7] J.C. Huang, Jui-Yang Wang, The Fabrication and Preservation of Nanostructures on Silicon Wafers with a Native Oxide Layer, Scanning. 34 (2012) 347-356.

[8] J.C. Huang, C.L. Tsai and A.A. Tseng, The influence of the bias type, doping condition and pattern geometry on AFM tip-induced local oxidation, Journal of the Chinese Institute of Engineers. 33 (2010) 55-61.


[9] A. A. Tseng, J. Shirakashi, S.K. Jou, J.C. Huang, and T.P. Chen, Scratch properties of nickel thin films using atomic force microscopy, J. Vac. Sci. Technol. B. 28 (2010) 202-210.


[10] J.C. Huang, C.L. Li, Jyh-Wei Lee, The study of nanoscratch and nanomachining on hard multilayer thin films using atomic force microscope, Scanning. 34 (2012) 51-59.


[11] J.C. Huang, C.M. Chen, High voltage nano-oxidation in deionized water and atmospheric environments by Atomic Force Microscopy, Scanning. 34 (2012) 230-236.

[12] J. C. Huang, C.M. Chen, The Study on the Atomic Force Microscopy Base Nanoscale Electrical Discharge Machining, Scanning. 34 (2012) 191-199.


[13] Novelline, Robert. Squire's Fundamentals of Radiology. Harvard University Press. (1997).

[14] Z.C. Li, Y. Jiao, T.W. Deines, Z.J. Pei, C. Treadwell 'Rotary ultrasonic machining of ceramic matrix composites: feasibility study and designed experiments', International Journal of Machine Tools and Manufacture. 45 (2005) 1402–1411.

[15] C.M. Suh, G.H. Song, M.S. Suh, Y.S. Pyoun, Fatigue and mechanical characteristics of nano-structured tool steel by ultrasonic cold forging technology', Materials Science and Engineering A. 443 (2007) 101–106.


[16] U. Rabe, W. Arnold, Acoustic microscopy by atomic force microscopy. Appl. Phys. Lett. 64 (1994) 1493.

[17] P.M. Lytvyn, O. Ya. Olikh, O.S. Lytvyn, O.M. Dyachyns'ka, I.V. Prokopenko, Ultrasonic assisted nanomanipulations with atomic force microscope, Semiconductor Physics, Quantum Electronics & Optoelectronics. 13 (2010) 36-42.

[18] F. Iwata, T. Matsumoto, R. Ogawa, and A. Sasaki: J. Vac. Sci. Technol. B. 17 (1999) 2452.