A Cross-Sectional TEM Specimen of a Multilayer Thin Film Prepared Using the FIB Technique

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A focused ion beam (FIB) mill equipped with a microsampling (MS) unit and combined with transmission electron microscopy (TEM)/scanning TEM-energy dispersive x-ray spectroscopy (STEM-EDXS) is a powerful tool for studies of the functional advanced materials. For the studies, the specimen must be prepared as a thin foil which is tranparent to the electron beam. Focused ion beam is very effective method for fabricating TEM specimen of the cross-sectional thin film with the “lift-out” technique using a tungsten (W)-needle probe as a micromanipulator. A multilayer film of MgB2/Ni deposited on a Si (001) substrate prepared by FIB-MS technique is presented. Before FIB fabrication, the surface of the multilayer film was coated with W-film to prevent the surface from bombardment by the ion beam. A bright field (BF)-STEM image of the multilayer film related to two-dimensional (2D) elemental mapping clearly showed the presence of MgB2-and Ni-nanolayers. The measured experimental spacing between Ni-nanolayers was comparable with the actual specimen design, but the thickness of Ni-nanolayer was not. Unexpected nanostructures of the formation of SiO2 film on the substrate surface and holes within the film were observed.

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Edited by:

Khairurrijal, Kuwat Triyana and Shidiq Nur Hidayat

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108-111

Citation:

H. Sosiati et al., "A Cross-Sectional TEM Specimen of a Multilayer Thin Film Prepared Using the FIB Technique", Applied Mechanics and Materials, Vol. 771, pp. 108-111, 2015

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July 2015

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[1] N. Ünlü, Preparation of high quality Al TEM specimens via a double-jet electropolishing technique, Materials Characterization 59 (2008) 547-553.

DOI: https://doi.org/10.1016/j.matchar.2007.04.003

[2] A.N. Stojic and F.E. Brenker, Argon ion slicing (ArIS): a new tool to prepare super large TEM thin films from Earth and planetary materials, Eur. J. Mineral. 22 (2010) 17-21.

DOI: https://doi.org/10.1127/0935-1221/2009/0022-2004

[3] J. Loos, J.K. J van Duren, F. Morrissey and R.A.J. Janssen, The use of focused ion beam technique to prepare cross-sectional transmission electron microscopy specimen of polymer solar cells deposited on glass, Polymers 43 (2002) 7493-7496.

DOI: https://doi.org/10.1016/s0032-3861(02)00643-2

[4] B.I. Prenitzer, L.A. Giannuzzi, K. Newman, S.R. Brown, R.B. Irwin, T.L. Shofner and F.A. Stefie, Transmission electron microscope preparation of Zn powders, using the focused ion beam lift-out technique, Metallurgical and Materials Transactions A, 29A (1998).

DOI: https://doi.org/10.1007/s11661-998-0116-z

[5] H. Sosiati, S. Hata, A. Matsumoto, H. Kitaguchi and H, Kumakura, Effect of ball-milling treatment on the microstructure of in situ powder in tube (PIT) MgB2 tape, AIP. Conf. Proc. 1454 (2012) 246.

DOI: https://doi.org/10.1063/1.4730732

[6] A.M. Vilas and J. Diaz, TEM specimen preparation techniques, Microscopy: Science, Technology, Application and Education (2010) 1232-1244.

[7] S. Hata, H. Sosiati, N. Kuwano, M. Itakura, T. Nakano and Y. Umakoshi, Removing focused ion-beam damages on transmission electron microscopy specimens by using a plasma cleaner, J. Elect. Micros. 55(1) (2006) 23-26.

DOI: https://doi.org/10.1093/jmicro/dfl001

[8] D.S. Ko, Y.M. Park, S.D. Kim and Y.W. Kim, Effective removal of Ga residue from focused ion beam using a plasma cleaner, Ultramicroscopy 107(4-5) (2007) 368-373.

DOI: https://doi.org/10.1016/j.ultramic.2006.09.004

[9] K. Takahashi, H. Kitaguchi and T. Doi, The effect of MgB2 layer thickness on the superconducting properties of the MgB2/Ni multilayer films, Supercond. Sci. Technol. 22 (2009) 025008.

DOI: https://doi.org/10.1088/0953-2048/22/2/025008

[10] H. Sosiati, S. Hata, T. Doi, A. Matsumoto, H. Kitaguchi and H. Nakashima, Nanostructure characterization of Ni and B layers as artificial pinning centers in multilayered MgB2/Ni and MgB2/B superconducting thin films, Physica C. 488 (2013) 1-8.

DOI: https://doi.org/10.1016/j.physc.2013.02.011

[11] Information on http: /www. nrel. gov/pv/measurements/trans_scan. html.

[12] Information on http: /www. eag. com/documents/z-contrast-imaging-elemental-analysis-AN461. pdf.

[13] G.P. Lopinski and D.D.M. Wayner, Molecular monolayer on Silicon surface, Material Matters, 3 (2) (2008) 38-44.