Preparation and Properties of CrN/NbN Nanomultilayers by Dual-Target D.C. Reactive Magnetron Sputtering
In this work, CrN/NbN nanometer multi-layers were deposited on the metal substrates by a dual-target DC reactive magnetron sputtering system. X-ray diffraction, Scanning Electron Microscope and Energy Dispersive Spectrometer were used to analysis the phase composition, crystal structure, surface morphology, fracture morphology and elemental composition of thin films. Micro Hardness Tester and wear-resistant experiments were used to test the hardness and wear properties of the films.
Linli Xu, Wenya Tian and Elwin Mao
Y. Q. Shan and B. Q. Liang, "Preparation and Properties of CrN/NbN Nanomultilayers by Dual-Target D.C. Reactive Magnetron Sputtering", Applied Mechanics and Materials, Vols. 80-81, pp. 163-167, 2011