Stiction Failure Mechanisms of the Micromachined Electrostatic Comb-Drive Structures

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Stiction is one of the most important and almost unavoidable problems in MEMS, which usually occurs when the restoring forces of the microstructures are unable to overcome the interfacial forces. Stiction could compromise the performance and reliability of the MEMS devices or may even make them malfunction. One of the pivotal process of advancing the performance and reliability of MEMS is to comprehend the failure modes and failure mechanisms of these microdevices. This article provides a critical investigation on the stiction failure mechanisms of the micromachined electrostatic comb-drive structures, which is significant to improve the reliability of microdevices, especially for microfilters, microgrippers, microaccelerometers, microgyroscopes, microrelays, and so on.

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Periodical:

Edited by:

Linli Xu, Wenya Tian and Elwin Mao

Pages:

850-854

DOI:

10.4028/www.scientific.net/AMM.80-81.850

Citation:

Y. S. Xu et al., "Stiction Failure Mechanisms of the Micromachined Electrostatic Comb-Drive Structures", Applied Mechanics and Materials, Vols. 80-81, pp. 850-854, 2011

Online since:

July 2011

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$38.00

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