A Three-Axis Angle Sensor with a Linear Encoder Scale Reflector
This paper presents a design study of an optical three-axis angle sensor for measurement of angular error motions of long-stroke precision linear stages. The three-axis angle sensor, which is based on a laser autocollimation method, can detect angular motions about the XYZ-axes simultaneously by using zeroth-and first-order diffraction beams from a diffraction grating mounted on a measuring target as a reflector. In this paper, an optical sensor head is designed in such a way that the three-axis angle sensor shares a diffraction grating with an optical sensor head of a linear encoder, which is already installed in a stage system. The optical sensor head of the three-axis angle sensor is designed in a size of smaller than 50 mm × 30 mm × 30 mm so that the sensor head can be compatible with the linear encoder. Details of the optical configuration designed for the sensor head, and some results of experiments are reported.
Liang Chia Chen and Duc-Hieu Duong
Y. Shimizu et al., "A Three-Axis Angle Sensor with a Linear Encoder Scale Reflector", Applied Mechanics and Materials, Vol. 870, pp. 141-146, 2017