Effect of Flow Rate of Reactive Gas on Mechanical and Tribological Properties of Carbon Nitride Coatings
This study discusses the mechanical and tribological properties of a series of carbon nitride coatings deposited by unbalanced DC magnetron sputtering using nitrogen-argon mixture gas and graphite targets. The carbon nitride coatings were with varying carbon/nitrogen ratio by varying the gas flow rate ratio of nitrogen gas/argon while kept the overall gas flow rate at constant. The carbon nitride coatings with C/N ratios from 2.01 to 3.27 were obtained. The coatings were characterized and studied by nanohardness, scratching, and wear testers. It was found that the carbon nitride coatings with C/N ratio=2.36 showed the best performance of all the evaluated properties.
Yunn Lin Hwang
Y. L. Su et al., "Effect of Flow Rate of Reactive Gas on Mechanical and Tribological Properties of Carbon Nitride Coatings", Applied Mechanics and Materials, Vol. 883, pp. 48-52, 2018