Effect of Flow Rate of Reactive Gas on Mechanical and Tribological Properties of Carbon Nitride Coatings

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This study discusses the mechanical and tribological properties of a series of carbon nitride coatings deposited by unbalanced DC magnetron sputtering using nitrogen-argon mixture gas and graphite targets. The carbon nitride coatings were with varying carbon/nitrogen ratio by varying the gas flow rate ratio of nitrogen gas/argon while kept the overall gas flow rate at constant. The carbon nitride coatings with C/N ratios from 2.01 to 3.27 were obtained. The coatings were characterized and studied by nanohardness, scratching, and wear testers. It was found that the carbon nitride coatings with C/N ratio=2.36 showed the best performance of all the evaluated properties.

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Periodical:

Edited by:

Yunn Lin Hwang

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48-52

Citation:

Y. L. Su et al., "Effect of Flow Rate of Reactive Gas on Mechanical and Tribological Properties of Carbon Nitride Coatings", Applied Mechanics and Materials, Vol. 883, pp. 48-52, 2018

Online since:

July 2018

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$38.00

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[1] T.K. Brotherton, J.W. Lynn: Chem. Rev. Vol. 59 (1960), p.841.

[2] J.J. Cuomo, P. A. Leary, D. Yu, W. Reuter, M. Frisch: J. Vac. Sci. Technol. Vol. 16 (1979), p.299.

[3] L.L. Bircumshaw, F.M. Tyler, D.H. Whiffen: J. Chem. Soc. Vol. 54 (1954), p.931.

[4] A.Y. Liu, M.L. Cohen: Science Vol. 245 (1989), p.841.

[5] K.D. Bakoglidis, I. Nedelcu, S. Schmidt, G. Greczynski, P. Ehret, L. Hultman: Tribol. Int. Vol. 98 (2016), p.100.

[6] P. Wang, T. Takeno, J. Fontaine, M. Aono, K. Adachi, H. Miki, T. Takagi: Mater. Chem. Phys. Vol. 145 (2014), p.434.

[7] E. Cappelli, S. Orlando, D. M. Trucchi, A. Bellucci, V. V. A. Mezzi, S. Kaciulis: Appl. Surf. Sci. Vol. 257 (2011), p.5175.

[8] P. Wang, T. Takeno, K. Adachi, H. Miki, T. Takagi: Appl. Surf. Sci. Vol. 258 (2012), p.6576.

[9] J. C. Sanchez-Lopez, M. Belin, C. Donnet, C. Quiros, E. Elizalde: Surf. Coat. Technol. Vol. 160 (2002), p.138.

[10] B. Zhou, X. Jiang, A. V. Rogachev, R. Shen, D. Sun, D. G. Pilipstou, L. Lu: Appl. Surf. Sci. Vol. 287 (2013), p.150.

[11] Y. S. Park, H. S. Myung, J. G. Han, B. Hong: Thin Solid Films Vol. 475 (2005), p.298.

[12] N. Alba de Sánchez, C. Carrasco, P. Prieto: Phys. B Vol. 337 (2003), p.318.

[13] A. G. Fitzgerald, L. Jiang, M. J. Rose, T. J. Dines: Appl. Surf. Sci. Vol. 175-176 (2001), p.525.

[14] C. Niu, Y. Z. Lu, C. M. Lieber: Sci. Vol. 261 (1993), p.334.

[15] J. Robertson: Tribol. Int. Vol. 36 (2003), p.405.

[16] Xiao-hua Zheng, Fang-er Yang, Li Chen, Zhan-ling Chen, Ren-guo Song, Xiang-hua Zhang: Surf. Coat. Technol. Vol. 258 (2014), p.716.

DOI: https://doi.org/10.1016/j.surfcoat.2014.08.009

[17] D. V. Shtanskii, S. A. Kulinich, E. A. Levashov, J. J. Moore: Phys. Solid State Vol. 45 (2002), p.1177.

[18] A. Darbe¨ıda, J. von Stebut, M. Barthole, P. Belliard, L. Lelait, G. Zacharie: Surf. Coat. Technol. Vol. 68-69 (1994), p.582.

DOI: https://doi.org/10.1016/0257-8972(94)90221-6