The Research of Two-Dimension Micromachined Level Posture Sensor
Two-dimension level posture sensor which can be sensitive to two vertical-directional tilt angle at one time is described. Adopt micro-machined technique two deep groove are corroded on the silicon plate, and two cantilever beams of metal heated hot wire is set up at each deep groove. Semicircle airtight space forms sense elements. Through two Wheatstone bridge, we get the tilt output voltage of x axis and y axis. To overcome environmental factors, a series of signal processing methods are proposed ,such as: zero temperature compensation, sensitive temperature compensation and linear compensation. The test about the sensor showed the sensor’s performance is as follow: resolution<0.05°,nonlinear<0.1%,the working temperature is enlarged.
L. H. Piao et al., "The Research of Two-Dimension Micromachined Level Posture Sensor", Advanced Materials Research, Vols. 108-111, pp. 676-681, 2010