The Research of Micromachined Airflow Tilt Sensor
Micromachine airflow tilt sensor which can be sensitive to tilt angle is described. Adopt micro-machined technique two deep groove are corroded on the silicon plate, and two cantilever beams of metal film heated hot wire is set up at each deep groove. Semicircle airtight space forms sense elements. Through Wheatstone bridge, we get the tilt output voltage. Single-chip computer and temperature sensor constitute compensation circuit to achieve temperature compensation and linear compensation. The test showed the sensor’s performance is as follow: measuring range is ±30,resolution<0.1°, working temperature is better than 50ms ,nonlinear<0.1%.The sensor is not only in small size but also in simply crafting. It is good in sensitive organ’s output consistency, and suitable for mass production.
L. H. Piao et al., "The Research of Micromachined Airflow Tilt Sensor", Advanced Materials Research, Vols. 108-111, pp. 682-685, 2010