Design and Fabrication of PDMS MLA Based on Digital Maskless Lithography Method

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Polymer MLA is fabricated by used of the DMD-based maskless lithography method. The process flow is described in this paper. The obtained photoresist concave MLA, which is used as a pattern to fabricate PDMS convex MLA, and the resulted PDMS MLA are measured with 3D surface profiler based on scanning white light interferometry. Besides, the transmission and reflection spectrum of PDMS film sample are also measured and used to calculate the refractive index of the PDMS film.

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Periodical:

Edited by:

Barry Tan and Mont Kumpugdee Vollrath

Pages:

71-76

Citation:

G. T. Xu et al., "Design and Fabrication of PDMS MLA Based on Digital Maskless Lithography Method", Advanced Materials Research, Vol. 1091, pp. 71-76, 2015

Online since:

February 2015

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$41.00

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