Nanostructured transparent conducting oxide (TCO) films such as tin doped indium oxide (ITO), antimony doped tin oxide (ATO), tin doped cadmium oxide (CTO) were deposited on suprasil grade pure silica glass from their respective precursors with wide variation of dopant concentration, 10, 30, 50, 70 at. % and their optical properties have been studied. The films were obtained by thermal curing (350 - 500°C) in air. If the cluster size be decreased to nanoscale then blue shift of bulk band gap occurs due to the quantum confinement effect of the semiconducting TCO materials. Free carrier concentration of ITO and ATO films were in the order of 1019 cc-1. The Moss-Burstein shift occurred in each case. The photoluminescence (PL) behaviour of the nanostructured materials revealed emissions for the HOMO-LUMO excitonic transitions. This was identified by selecting the excitation energy according to the photoluminescence excitonic transitions (PLE).