Vacuum-Plasma Synthesis of Functional Coatings Using Targets Obtained by the Sol-Gel Method


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To prepare coatings by electron-beam sputtering, targets have been designed and synthesized by a sol-gel method, based on SiO2 and TiO2 materials. The optimum basic compounds for the synthesis of stable silica sol and titanium are reported. Spectroscopic studies have been conducted for the coatings aiming at the characterization in terms of optical characteristics, such as refractive index, reflectance, transmission and absorption coefficients. The morphology of the layers was investigated by atomic force (AFM) and scanning electron (SEM) microscopies.



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A. V. Rogachev et al., "Vacuum-Plasma Synthesis of Functional Coatings Using Targets Obtained by the Sol-Gel Method", Advanced Materials Research, Vol. 1117, pp. 156-158, 2015

Online since:

July 2015




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[1] A. V. Rogachev, M.A. Bing Zhou, Xiaohong Jiang, Zhubo liu, Ruiqi Shen. Preparation and characterization of TiO2 thin film by thermal oxidation of sputtered Ti film, Materials Science in Semiconductor Processing 16 (2013). p.513–519.


[2] A.V. Rogachev, N.N. Fedosenko, N.G. Ariko, D.L. Gorbachev, A.S. Rudenkov. Morphology and optical properties of multilayer refractory oxide coatings. Problems of physics, mathematics and technics 4(17) (2013). p.21–28.

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