Rising demand for sustainable development motivated our eco-friendly polishing method. In this study, fixed-abrasive polishing using a compact robot was proposed based on a new approach that includes the idea of secondary tools. The effectiveness of using a compact robot was investigated by life cycle assessment for eco-friendly polishing processing. The actual polishing process was carried out with low pressure to determine the potential of the proposed polishing method. As a result, low-environmental-load processing was achieved by machine downsizing without affecting the processing results by designing an independent pressure mechanism along the equipment’s main axis. The nano-surface could also be obtained with this method for glass material.