Study on Temperature Field of Different Substrate Shape in Preparing Diamond Film


Article Preview

Shell diamond film was prepared by DC plasma CVD, and substrate shape had an important influence on the growth of shell diamond film. Simulations of the substrate temperature field have been done respectively when the substrates are convex and concave. The simulation results show that, DC plasma flow more easily on convex substrate than concave substrate, and temperature field of convex substrate is more uniform than concave substrate; uniform temperature field was help to prepare high quality shell diamond film. In this study, shell diamond films were prepared on convex and concave substrate, respectively in experience. The results indicate that the growth of diamond film on convex substrate was better than on concave substrate, and Raman spectrum shows, on the convex substrate, high quality shell diamond film was prepared successfully, and it accords with the simulation results.



Edited by:

Dunwen Zuo, Hun Guo, Hongli Xu, Chun Su, Chunjie Liu and Weidong Jin




D. S. Li et al., "Study on Temperature Field of Different Substrate Shape in Preparing Diamond Film", Advanced Materials Research, Vol. 136, pp. 256-259, 2010

Online since:

October 2010




[1] D.S. Li, D.W. Zuo, R.F. Chen et al.: Solid State Ionics Vol. 179 (2008), p.1263.

[2] D.M. Trucchi, C. Scilletta, E. Cappelli et al.: Diamond and Related Materials. Vol. 15 (2006)No. (4-8), p.827.

[3] N. Jiang, S. Kujime, I. Ota, et al.: Journal of Crystal Growth 2000, Vol. 8, p.265.

[4] M. Vila, A.B. Lopes, F.A. Almeida: Diamond and Related Materials 2008, Vol. 17 (2), p.190.

[5] Tai-Fa Young: Surface and Coatings Technology 2007, Vol. 202 (4-7), p.1208.

[6] A. Tallaire, J. Achard, F. Silva: Diamond and Related Materials 2005, Vol. 14 (3-7), p.249.

[7] D. G. Goodwin: J. Appl. Phys. Vol. 74 (1993), p.6888.

[8] Xin Tang, Bin Yuan Zhao, Ke Ao Hu: Materials Letters 2005, Vol. 59 (13), p.1673.

[9] D.S. Li, D.W. Zuo, R.F. Chen et al.: Synthesis and Reactivity in Inorganic, Metal Organic and Nanometal Chemistry Vol. 38 (2008), p.32.

[10] I. Nakamori, T. Takagi, T. Takeno: Diamond & Related Materials Vol. 14 (2005), p.2122.

[11] Mark J. Kushner: J. Appl. Phys. Vol. 62 (1987), p.4763.

[12] Alison Mainwood: J Mater Sci: Mater Electron. Vol. 17 (2006), p.453.

[13] M. Grujicic: JOURNAL OF MATERIALS SCIENCE Vol. 35 (2000), p.5359.

[14] A.F. Azevedo, R. C. Mendes de Barros, S.H.P. Serrano: Surface & Coating Technology Vol. 200 (2006), p.5973.

[15] S.M. Huang, Franklin, C.N. Hong: Surface & Coating Technology Vol. 200 (2006) , p.3151.

[16] M.D. Fries, Y.K. Vohra, C.S.J. Pickles: J. Appl. Phys. Vol. 35 (2002), p.105.