Nanoimprint Lithography: A Promising Candidate for Next-Generation Lithography

Abstract:

Article Preview

Due to its inherent simplicity and low cost, the popularity of nanoimprint lithography is rising, and is positioned to succeed EUV as the most popular choice for next-generation lithography. This paper presents a homemade nanoimprint lithography prototype tool with a high precision alignment system, which adopts both macro and micro actuators to achieve coarse and fine alignment. Linear motors with 300 mm travel range and 0.1 µm step resolution, and piezoelectric translators with 50 µm travel range and 0.1 nm step resolution are used as macro and micro actuators, respectively. Imprint of 80nm width gratings with a 250 nm pitch is taken as an example to depict the process of NIL. High resolution and fine fidelity of the imprinted results demonstrate NIL’s promising candidate for next-generation lithography, and potential applications in manufacturing integrated circuits, optical, chemical, and biological nanostructures or micro-devices.

Info:

Periodical:

Advanced Materials Research (Volumes 139-141)

Edited by:

Liangchi Zhang, Chunliang Zhang and Tielin Shi

Pages:

1558-1561

DOI:

10.4028/www.scientific.net/AMR.139-141.1558

Citation:

X. Q. Fan "Nanoimprint Lithography: A Promising Candidate for Next-Generation Lithography", Advanced Materials Research, Vols. 139-141, pp. 1558-1561, 2010

Online since:

October 2010

Authors:

Export:

Price:

$35.00

In order to see related information, you need to Login.

In order to see related information, you need to Login.