Positioning of Characteristic Points in IC Chip’s Micro-Topography Based on Cross Correlation Matching and Image Projection Transformation

Abstract:

Article Preview

In accurate optical inspection of IC chip, it is necessary to recognize and calibrate the IC micro-topography completely and accurately. Positioning method of characteristic points in IC chip’s micro-topography based on cross correlation matching and image projection transformation is investigated to realize high precision detection of surface topography. On the basis of extracting wavelet high-frequency components of IC topography conjugate images which is shot by high- definition CCD cameras from different space positions, the coordinate information of some selected topography’s characteristic points is shown. Cross correlation matching is applied to definite the characteristic point’s relative positions in the projected images, then relationship of image projection transformation is established for calculating and determining the characteristic point’s absolute coordinates, which facilitates following topography detection of IC chip. Experiment analysis and data comparison indicate that accurate coordinate positioning results of characteristic points can be obtained by this method, the research basis for following IC topography model structuring and micro- flaw characteristic detecting can also be provided.

Info:

Periodical:

Advanced Materials Research (Volumes 139-141)

Edited by:

Liangchi Zhang, Chunliang Zhang and Tielin Shi

Pages:

1996-2001

DOI:

10.4028/www.scientific.net/AMR.139-141.1996

Citation:

Z. W. Liang et al., "Positioning of Characteristic Points in IC Chip’s Micro-Topography Based on Cross Correlation Matching and Image Projection Transformation", Advanced Materials Research, Vols. 139-141, pp. 1996-2001, 2010

Online since:

October 2010

Export:

Price:

$35.00

[1] S.L. ZHU, Taleb-Ahmed A. Pattern Recognition Letters, Vol. 27 (2006) No. 16: p.1893-(1904).

[2] LIAO S.Z. J. of Image and Graphics, Vol. 24 (2006). No. 7: pp.593-596.

[3] LI G. P, etal. Image and Vision Compu. Vol. 3 (2007) No. 1: pp.11-17.

[4] LI De-hua, etal. Computer and Digital Engineering. Vol. 23 (2004) No. 6: pp.37-40 (in Chinese).

[5] ZHU Hong-de, LOU Xiao-ping, DENG Wen-yi, LV Nai-guang. Computer Eng. and Appl., Vol. 11 23 (2006) No. 3: pp.217-218.

[6] WANG Yue-zong, etal. Computer Engineering and Applications, Vol. 25 (2003) No. 9: p.98100.

[7] Zhu H. Foundation of Digital Image Processing [M]. ( Press of Science. China, 2005).

[8] Zheng N N. Computer Vision and Pattern Recognition [M]. ( Press of National Defense Industry. China, 2005) (in Chinese).

[9] Jia Y D. Machine Vision [M]. ( Press of Science. China 2006).

[10] Cheng Z X. Wavelet Analyze Algorithm and Application [M]. (Press of Xi'an Jiaotong University. China 2005).

[11] H Zhu, J Zhou, H Li. SPIE. 2007. 4875: pp.651-655.

[12] Zhao Z Q, Xiong Y J. Computer of Industry Controlling. Vol. 18. 2005, No. 10: pp.1-2.

[13] Yuan H. Journal of S.C.U. T, Vol. 30. 2002. No. 4: pp.60-64.

[14] Zheng Lian. Journal of Beijing Institute of Technology, Vol. 17. 1997, No. 8: pp.193-198.

[15] Shi Min, Xie Sheng-li. Journal of S.C.U. T, Vol. 34. 2006, No. 1: pp.18-23.

[16] Song C. L, etal. J. of China Univ. of Mining & Technology, Vol. 17. 2007. No. 3: pp.121-125 Z X.

In order to see related information, you need to Login.