Optimization Design of a Piezoelectric Transduction Silicon Resonant Pressure Sensor


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This paper presents about the optimization design of Silicon resonant pressure sensor. The new idea is the Silicon circular resonator was used as the sensing resonator. This sensor is Lead-Zinconate-Titanate (PZT) driven and the resonant frequency shift also detected by PZT. This micro resonant pressure sensor works on the principle of resonant shift caused by the change of internal stress due to applied of the external pressure. First, we analyze the numerical relation of circular resonator. Then, Finite element analysis (FEA) has been examined for optimization for the size of Si circular diaphragm, size of the PZT patches and placement of the PZT was analyzed. And the fabrication process also presented in this paper. The pressure range is 0~0.1Mpa. The resonant frequency is about 102.29 kHz and the linearity of the output frequencies shift is so good under Silicon diaphragm small deflection limited.



Advanced Materials Research (Volumes 139-141)

Edited by:

Liangchi Zhang, Chunliang Zhang and Tielin Shi






S. S. Nay et al., "Optimization Design of a Piezoelectric Transduction Silicon Resonant Pressure Sensor", Advanced Materials Research, Vols. 139-141, pp. 2256-2261, 2010

Online since:

October 2010




[1] Chen Deyoung, Cui Dafu, Wang Li, Yu Zhongyao. Numerical Modeling of a SiN Beam Resonant Pressure Sensor. Proceeding of SPIE (2001), Vol. 4601: p.173.

DOI: 10.1117/12.444702

[2] Fan Shang Chun, Man Hyung Lee. The frequency characteristics of the Beam Resonant of the Thermal Excited Silicon Resonant Pressure sensor. Proc. of the IEEE/ASME (2003): p.460.

DOI: 10.1109/aim.2003.1225139

[3] Goran Stemme. Resonant Silicon Sensor. Micro mech; micro eng; (1991), Vol (1): p.113.

[4] J.C. Greewood, D.W. Satchell. Miniature Silicon resonant pressure. Proceeding of IEEE (1988); Vol 135 (5): p.369.

[5] J.C. Greewood, T. Wray. High Accuracy pressure measurement with a Silicon resonant sensor. Journal of Sensors and Actuators (1993); Vol (37-38): p.82.

DOI: 10.1016/0924-4247(93)80017-b

[6] Ikeda K, Kuywyama H, Kobayshi T, Watanebe T, Nishikawa T, Yoshida T, Harada K. Silicon pressure sensor integrates resonant strain gage on diaphragm. Journal of Sensors Actuators (1990); Vol (21-23): p.146.

DOI: 10.1016/0924-4247(90)85028-3

[7] Zhang Yang Tang, Shang Chun Fan, Chen guang Cai. A Silicon micromachined resonant pressure sensor. 8th China Nanoscience and Tech; symposium (CINSTS09) (2009); p.012042.

[8] Cui Zheng, Chen Deyong, Xia Shanhong. Design and Modeling of Silicon Resonant Pressure Sensor. Proceeding of SPIE (2001); Vol. 4408: p.187.

DOI: 10.1117/12.440192

[9] Timoshenko, S. Woinowsky, Krieger, S. Theory of Plates and Shells. 2 nd Ed. New York: Mc GrawHill, (1959).

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