Micro-Positioning Platform Based on Giant Magentostrictive Material
Piezoelectric (PZT) material is widely used to drive micro-positioning platform, but the energy density of PZT is low, which restricts the application of PZT micro-positioning platform. In order to overcome its disadvantages, A kind of new micro-positioning platform actuated by giant magnetostrictive material (GMM) was presented in the paper. Based on integrated optimization method, structure designing, magnetic circuit designing and temperature control designing were carried out. The dynamic performance of GMM micro-positioning platform was simulated, and simulation result shows the designing is feasible. The prototype was manufactured, and the measurement system was set up. The experiments on the platform were carried out, and experiment results show that the platform has good output performance with positioning accuracy of ±0.03μm and load capacity of 50kg, and can meets the requirements of large-power system.
Liangchi Zhang, Chunliang Zhang and Tielin Shi
Q. G. Lu et al., "Micro-Positioning Platform Based on Giant Magentostrictive Material", Advanced Materials Research, Vols. 139-141, pp. 788-791, 2010