In this paper, the perfluoro aryl ether dendrons were synthesized by mesylate reaction, and using the dendron as a modifier to prepare a novel fluorinated polyhedral oligomeric silsesquioxane ( F-POSS) nano-particle bearing this fluorine-containing dendron. In this approach, the Williamson ether synthesis technique was used as the generation enhancement step. Second generation perfluorobenzyl alcohol dendron was obtained from active mesylated precursors. This mesylate actiation technology has the advantage of short reaction times in the subsequent steps and avoids chromatographic purifiction. Second genenriation dendron was then built by repitition of Williamson ether synthesis reaction of mesylate derivative. It is possible for this new nano-particle to be used in the modification of polymer materials to make the durable superhydrophobic and oilphobic surface functional materials with excellent self-cleaning properties.