Study of Indium Oxide Rod-Like Structures Synthesized Using Metalorganic Chemical Vapor Deposition
We have investigated the morphological changes with varying the substrate temperature in the range of 350-400°C, in synthesizing the indium oxide (In2O3) rod-like structures by using the metalorganic chemical vapor deposition method. The as-synthesized rod-like structures was aligned perpendicular to the Si substrate. X-ray diffraction (XRD) and selected area electron diffraction (SAED) analyses demonstrated that the rods had a cubic In2O3 structure. PL spectra of the In2O3 rod-like structures exhibited the visible light emission. We discussed the possible growth mechanisms.
T. Chandra, K. Tsuzaki, M. Militzer and C. Ravindran
H. W. Kim and S.H. Shim, "Study of Indium Oxide Rod-Like Structures Synthesized Using Metalorganic Chemical Vapor Deposition", Advanced Materials Research, Vols. 15-17, pp. 169-174, 2007