UV curable 3-(trimethoxysilyl) propyl methacrylate MPTMS modified silica hybrid coating was prepared through sol-gel process from TEOS and MPTMS in acid medium for different ratios between TEOS and MPTMS. The structure of the hybrid coating and the formation of inorganic-organic hybrid networks were studied by FT-IR. It was found that the organic networks were formed by the polymerization of C=C bonds at 1638 cm-1. The influences of the photoinitiator content and the curing time on the curing degree of the mixture system were investigated. The results showed that the optimal photoinitiator content was 3%, and curing time was 180 s. The thermal stability of the UV cured coating was investigated by TG-DTA. The results showed that the contents of low-molecular compounds such as H2O, CH3OH, etc. were decreased in cured coatings with the increasing of the MPTMS concentration, thus significantly decreasing of the thermal weight-loss at temperature lower than 400°C.