Stability and Performance of Virtual Reality-Based Telenanomanipulation System in SEM
In this paper, a master/slave telenanomanipulation control system with force feedback is established with the micro-positioner (Attocube) working in scanning electron microscope (SEM) as the slave side and the haptic device (Omega3) as the master side. An improved virtual coupling (IVC) algorithm is introduced based on nanoscale virtual coupling (NSVC) by adding a proportional- plus-integral (PI) velocity controller in the haptic interface. The stability and performance of the established system are discussed. This method leads to an explicit design procedure for virtual coupling networks which give greatest performance while guaranteeing stability both on moving carbon nanowires in SEM and measuring force at the point of device-human contact.
Yanguo Shi and Jinlong Zuo
D. J. Li et al., "Stability and Performance of Virtual Reality-Based Telenanomanipulation System in SEM", Advanced Materials Research, Vols. 183-185, pp. 1746-1751, 2011