In this paper, the process of direct laser fabricating (DLF) thin-walled parts with Inconel 625 alloy was studied. The interrelationship between deposition quality and process parameters has been analyzed in the aspects of laser power. Scanning velocity, powder feed velocity, z-increment. The further investigations of study lie on the influence of process parameters on geometrical characterization of single cladding layer, the Axis-Z increments on height of thin-walled part, as well as the microstructure of fabricated sample of Inconel 625. The results based on above experiments show that the Inconel 625 alloy parts can be fabricated by direct laser fabrication method and the samples were fully dense, homogenous and free of defects with the parameters under a certain range.