Development of an Ultrasonic-Vibration Microforming Apparatus


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This study attempted to design and develop an integrated system of a microforming apparatus with ultrasonic-vibration device. A closed-loop displacement and force control was implemented with servo motors. The apparatus has a load capacity up to 10,000N. The displacement error curve of the platform was measured with API 5DLS laser interferometer, and fed into the control program to compensate for motion errors. The positioning precision of the platform has been upgraded up to 5μm, with a load accuracy of 0.5N. Taking advantage of FEA and optimization technology, boosters and resonator with 35 kHz frequency were designed and fabricated. The simulation results and the experimental results match perfectly on the account of resonance frequencies and amplitudes. To the end, the integration of the ultrasonic-vibration device with microforming platform demonstrates a precision process for micro-parts.



Advanced Materials Research (Volumes 189-193)

Edited by:

Zhengyi Jiang, Shanqing Li, Jianmin Zeng, Xiaoping Liao and Daoguo Yang




J. C. Hung and C. S. Shieh, "Development of an Ultrasonic-Vibration Microforming Apparatus", Advanced Materials Research, Vols. 189-193, pp. 4092-4096, 2011

Online since:

February 2011




[1] M. Geiger, M. Kleiner, R. Eckstein, N. Tiesler, and U. Engel, Microforming, Ann. CIRP 50(2) (2001), p.445–462.


[2] M. Geiger, A. Mebner, and U. Engel, Production of microparts-size effects in bulk metal, similarity theory, product. Eng. 4(1), 1997, PP. 55-58.

[3] T.A. Kals and R. Eckstein, Journal of Materials Processing Technology, 103 (2000), pp.95-101.

[4] U. Engel and R. Eckstein, Journal of Materials Processing Technology, 2002, Vol. 125-126, pp.95-101.

[5] U. Engel, A. Messner, and N. Tiesler, Proceeding of the 1stESAFORM Conf. on Materials forming, Sophia Antipolis, France, pp.77-88.

[6] U. Engel, Tribology in Microforming, Wear, 2006, p.265–273.

[7] U. Engel and R. Eckstein, Journal of Materials Processing Technology, 2002, Vol. 125-126, pp.95-101.

[8] M. Murakawa, P. Kaewtatip, and M. Jin, Trans. NAMRI/SME, 2000, v. 28, pp.75-80.

[9] M. Murakawa and M. Jin, Journal of Materials Processing Technology, 2001, pp.81-86.

[10] T. Jimma, Journal of Materials Processing Technology, 1998, pp.406-412.

[11] M. Jin, Advanced Technology of Plasticity, 1999, pp.19-24.