Preparation and Dielectric Measurement of Pb(Zr0.95Ti0.05)O3 Ferroelectric Films
This paper reported an improved PZT95/5 sol-gel preparation method, which with separated lead acetate trihydrate, zirconium nitrate, and titanium butoxide precursor-monomer. The PZT95/5 sol-gel precursor was prepared by these three stable-separated precursor-monomers and some chelating agents. It was deposited onto Si substrate by spin-coating. Researches were carried out on the film structure and dielectric properties associated with water content, sol-gel precursor content and processing techniques. After the precursor solution prepared successfully, a very large dielectric constant, strong stability and fine relaxation of PZT95/5 ferroelectric-films were obtained, whose dielectric constant was 449 at room temperature and changed flatly before 180°C . The peculiar permittivity reached 3446 occurred at the curie temperature (240°C ). The εr-T plots with different frequencies conformed to the material properties of relaxor ferroelectrics, and also the sample had longer relaxation time confirmed by Cole-Cole plots.
Jianmin Zeng, Taosen Li, Shaojian Ma, Zhengyi Jiang and Daoguo Yang
D. S. Yu et al., "Preparation and Dielectric Measurement of Pb(Zr0.95Ti0.05)O3 Ferroelectric Films", Advanced Materials Research, Vols. 194-196, pp. 2322-2325, 2011