Control on Arc Source Device during Arc Ion Plating
A controller based on DSP (Digital signal processor) is built during Arc Ion Plating. The purpose of controller is to realize real-time and flexible control on Arc Source Device. It is shown that by using DSP, Arc Source Device can be controlled and protected online. As a result, not only can Arc Source Device change output current according to the order from upper monitor momentarily, but also the faulty or failed Arc Source Device can be isolated rapidly.
Helen Zhang, Gang Shen and David Jin
Y. Z. Li et al., "Control on Arc Source Device during Arc Ion Plating", Advanced Materials Research, Vols. 204-210, pp. 2113-2116, 2011