Fabircaiton and Characterization of a New Bi-Stable Electromagnetic Microrelay
This paper reports the fabrication and characterization of a new bi-stable electromagnetic microrelay based on surface micromachining technology. It mainly consists of an integrated coil, a SU-8 spacer, a nickel planar spring in combination with permanent magnet, and electrical contacts. With current, the spring is attracted or pulled up to close or open the external circuit. Without current, permanent magnet keeps the spring at bottom which reduced the power consumption. The bi-stability of electromagnet microrelay is realized by the balance between magnetic force and the elastic force of the spring. The detailed fabrication process is given. Testing results shows that this new bi-stable electromagnetic microrelay can work at 5V voltage pulse with large deflection at 350μm and switching time is fast at 4.96due to special design.
X. D. Miao et al., "Fabircaiton and Characterization of a New Bi-Stable Electromagnetic Microrelay", Advanced Materials Research, Vols. 211-212, pp. 605-608, 2011