Contributions to Processing of Self-Lubricated, Nanocomposite Wear Resistant Coatings by Reactive UM Magnetron Co-Sputtering
Recently a great deal of attention has been devoted to sputtering technology for nanostructured coatings. Wear resistant nanocomposite coatings are very promising materials, which can be easily scaled up for industrial production. Therefore, reactive magnetron sputtering of alloy targets or co-sputtering of elemental metal targets are now intensively investigated. Present paper presents some results of our research work for optimization of tribological properties by definition of selected parameters for reactive sputtering process conditions of self-lubricated carbon doped TiAlN coating. Tailored nanocomposite thin films of multicomponent and multiphase materials have been performed by DC reactive UM magnetron co-sputtering of TiAl and TiC target materials in Ar–N2 respectively C2H2 and CH4 as carbon precursor gases.
Ionel Chicinaş and Traian Canta
G. Strnad et al., "Contributions to Processing of Self-Lubricated, Nanocomposite Wear Resistant Coatings by Reactive UM Magnetron Co-Sputtering", Advanced Materials Research, Vol. 23, pp. 197-200, 2007