Mini-Nano-Displacement Measurement with Double Diffraction Grating
Based on Doppler and Fourier optics analysis method, analyzed the configuration of double diffraction grating, and built its non-contact optical measurement mathematic model. And built double diffraction grating interference displacement measurement system, the design of double diffraction light path can compensate the deflection angle of grating moving, greatly improved tolerance of grating’s deflection. The compact and micro configuration of its light path, shorten optical distance, improving system’s environment anti-interference ability. Experimental resulting show, within 20nm displacement measurement, and<50mm/sec measurement speed, the system resolution is 1nm and measurement precision is less than 30nm.
Ran Chen and Wenli Yao
M. L. Jiang et al., "Mini-Nano-Displacement Measurement with Double Diffraction Grating", Advanced Materials Research, Vols. 230-232, pp. 1159-1163, 2011