The abrasive jet finishing process with wheel as restraint is a kind of compound precision finishing process that combined grinding with abrasive jet precision machining, in which inject slurry of abrasive and liquid solvent to grinding zone between grinding wheel and work surface under no depth of cut feed condition when workpiece grinding were accomplished. The abrasive particles are driven and energized by the rotating grinding wheel and liquid hydrodynamic pressure and increased slurry speed between grinding wheel and work surface to achieve micro removal machining. The micro removal machining with grinding wheel as restraint, not only to attain higher surface form accuracy but also to can efficiently acquire defect-free finishing surface with Ra0.15~1.6$m and finally achieve high efficiency, high precision and low roughness values, furthermore, integrating grinding process and abrasive jet finishing into one features. In the paper, surface topography finished by abrasive jet with grinding wheel as restraint was analyzed and evaluated with power spectral density function. Experiments were performed with plane grinder M7120 and workpiece material 45 steel. The machined surface morphology was studied using Scanning Electron Microscope (SEM) and the microscope and microcosmic geometry parameters were measured with TALYSURF5 instrument. The experimental results show that microcosmic geometry parameter values were diminished comparing with ground surface. Furthermore, the mean ripple peak distancing was decreased and, ripple and peak density were increased. The results indicate that surface qualities by machined with abrasive jet precision finishing were improved obviously.