Surface Damage Analyse of KDP Crystal Grinding


Article Preview

The functional crystal material Potassium dihydrogen phosphate KH2PO4 (KDP for short) is widely used in navigate, spaceflight, national defenses, energy sources and information technology fields because of its excellent non-linear optical property. However, KDP crystal has some disadvantages such as soft, fragile, hygroscopic, anisotropy, thermally sensitive and low rigidity, which make it a most difficult processing material. In this paper, KDP crystal was machined by the wheel grinding. Some equipment, such as Optic microscope, SEM, ZYGO and Raman spectroscope were used to observe and analysis the KDP crystal surface which was damaged during grinding. The results shows that serious nicks, crashes and the press stress appeared on the surface of the KDP crystal after grinding.



Advanced Materials Research (Volumes 24-25)

Edited by:

Hang Gao, Zhuji Jin and Yannian Rui




D. J. Wu et al., "Surface Damage Analyse of KDP Crystal Grinding", Advanced Materials Research, Vols. 24-25, pp. 349-354, 2007

Online since:

September 2007




[1] Wang Zhanguo. Situation and development tendency of semiconductor material. Journal of Synthetic Crystals. Vol. 3-4 (1997), pp.284-290.

[2] Fan Dianyuan, He Xianshi. Inertial Confinement Fusion energy sources and laser drivers, The exploring of nature. Vol. 18 (1) (1999), pp.31-35.

[3] Wang Jinghe, Chen Mingjun, Dong Shen et al. Recent Advance in Ultra Precision Machining Technique of KDP crystal, Tool Engineering. Vol. 38 (2004), pp.56-59.

[4] S.R. Arrasmith. Details of the polishing spot in magnetorheological finishing (MRF). Part of the SPIE Conference on Optical Manufacturing and Testing Ill, 92 Denver, Colorado • July (1999), pp.92-100.

[5] M. R. Kozlowski. Influence of Diamond Turning and Surface Cleaning Processes on the Degradation of KDP Crystal Surfaces, SPIE Vol. 1561 Inorganic Crystals for Optics, Electro-Optics, and Frequency Con-version (1991), pp.59-69.


[6] Yang Fuxing. Study on the Ultra - precision Machining Technology for KDP Crystals, Technology and Test, Vol. 9(2003), pp.63-65.

[7] Zhang Whensheng, Zhang Feihu, Dong Shen, Influence of the diamond cutting parameters of KDP crystals on crystals fogging, Optical Technique. Vol. 29 No. 4, July (2003), pp.427-428.

[8] Baruch A. Fuchs, Fine diamond turning of KDP crystals. APPLIED OPTICS, Vol. 25, No. 11, (1986), pp.1733-1735.


[9] Zhang Yinxia. Study on Surface Layer Damage in Mono-crystalline Silicon Wafer Induced by Ultra-precision Grinding. Dalian: DaLian University of Technology. (2006).

[10] Zhang Shengli. Study on Surface/subsurface Damage Detection of Ultra-precision Ground Silicon Wafer. Dalian: DaLian University of Technology. (2005).

[11] G. W. Lu, X. Sun. Raman Study of Lattice Vibration Modes and Growth Mechanism of KDP Single Crystals. Cryst. Res. Technol. Vol. 1, (2002), pp.93-99.


[12] Landolt-Bornstein. Springer-Verlag. Tab. S. 71 ff. III Figuren: 19 KDP-Gruppe (2003), p.396.

[13] Zhao Peng, Xia Hairui. Raman Spectra Analysis of DKDP Crystal. Spect roscopy and Spectral Analysis, Vol. 2, (2007), pp.292-294.

[14] Zhang Gguangyin, Lan Guoxiang. Crystal lattice vibration spectroscopy. Higher Education Publishing Company, (1991).

[15] Cheng Guangxun. Raman- Brillouin. Beijing- science publishing company, (2001).