NEMS/MEMS Technology and Devices, ICMAT2011

Volume 254

doi: 10.4028/

Paper Title Page

Authors: Rahul Agarwal, Jin Xie, Kia Hian Lau, Praveen Kumar Sampath, Nagarajan Ranganathan, Janak Singh, Ming Lin Julius Tsai

Abstract: A CMOS compatible integrated MEMS process for fabricating differential capacitance based sensor on SOI wafer is presented. High aspect ratio...

Authors: Jafar Alvankarian, Mitra Damghanian, Majlis Burhanuddin Yeop

Abstract: There are high interests among the researchers and industries for effective deposition of thick layer liquid photo-resists with applications...

Authors: Wan Chia Ang, Man I Lei, Julius Ming Lin Tsai, Kam Chew Leong, Chuan Seng Tan

Abstract: Platinum (Pt) thin film microheater is designed for integration in a well-known dog bone-like microtensile test structure for high...

Authors: Badariah Bais, Liang Wen Loh, Rosminazuin A. Rahim, Majlis Burhanuddin Yeop

Abstract: Micro-cantilever has been proven as an outstanding platform for extremely sensitive chemical and biological sensors. MEMS cantilever-based...

Authors: Cier Siang Chua, Ming Lin Julius Tsai, Min Tang, Sheel Aditya, Zhong Xiang Shen

Abstract: A 100GHz planar helix with straight-edge connections slow-wave structure incorporating coplanar waveguide feed has been designed and...

Authors: Song Cui, Yeng Chai Soh

Abstract: In this paper, a new estimation method is proposed to estimate the separation gap and other unknown parameters in Casimir force actuated...

Authors: Ali Reza Bahadorimehr, Mitra Damghanian, Majlis Burhanuddin Yeop

Abstract: A static micromixer having a fractal-like structure is proposed inspired from natural flow networks. The mixing behavior of flow in this...

Authors: Sanchitha Fernando, Tang Min, Lynn Khine, Rahul Agarwal, Kia Hian Lau, Jeffrey B.W. Soon, Ming Lin Julius Tsai

Abstract: This paper presents a novel piezoelectric actuator design that achieves low curling due to residual film stress. The proposed actuator...

Authors: Mark O. MacQueen, Jeanette Mueller, Dee Chang Fu, Ille C. Gebeshuber

Abstract: We propose a concept for a novel ‘innervated’ material that is assembled by addition of a multitude of MEMS to a conventional material. This...


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