Developing High Sensitivity Biomass Sensor Using Lamé Mode Square Resonator
In this paper, a new cost-effective and reliable high performance biomass sensor is presented. Compared to previous biomass sensors, the developed sensor shows a potential to detect smaller biological agents by producing a high quality output signal at atmospheric pressure. The biomass sensor is a micro machined silicon squared plate that is excited in the Lamé bulk acoustic resonant mode at a frequency of 37.8 MHz, with quality factor of 10,000 and the mass sensitivity of -400 Hz/pg.
Lynn Khine and Julius M. Tsai
A. Heidari et al., "Developing High Sensitivity Biomass Sensor Using Lamé Mode Square Resonator", Advanced Materials Research, Vol. 254, pp. 46-49, 2011