Developing High Sensitivity Biomass Sensor Using Lamé Mode Square Resonator

Abstract:

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In this paper, a new cost-effective and reliable high performance biomass sensor is presented. Compared to previous biomass sensors, the developed sensor shows a potential to detect smaller biological agents by producing a high quality output signal at atmospheric pressure. The biomass sensor is a micro machined silicon squared plate that is excited in the Lamé bulk acoustic resonant mode at a frequency of 37.8 MHz, with quality factor of 10,000 and the mass sensitivity of -400 Hz/pg.

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Periodical:

Edited by:

Lynn Khine and Julius M. Tsai

Pages:

46-49

DOI:

10.4028/www.scientific.net/AMR.254.46

Citation:

A. Heidari et al., "Developing High Sensitivity Biomass Sensor Using Lamé Mode Square Resonator", Advanced Materials Research, Vol. 254, pp. 46-49, 2011

Online since:

May 2011

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Price:

$35.00

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