NEMS/MEMS Technology and Devices, ICMAT2011

Volume 254

doi: 10.4028/

Paper Title Page

Authors: Sunao Murakami, Tsuyoshi Ikehara, Mitsuo Konno, Ryutaro Maeda, Takashi Mihara

Abstract: Additional formation of functional films on the defined micro-areas on the microstructure is often complicated and need advanced control...

Authors: Yosuke Murayama, Hideyuki Homma, Shigeo Yamaguchi

Abstract: This study is to measure accurate temperature at a point which is cooled and heated. We proposed and fabricated a new Peltier device with a...

Authors: Yoko Okuwaki, Shigeo Yamaguchi

Abstract: We have studied a novel Peltier device having a metallic tip which is directly sandwiched between P-type and N-type thermoelectric...

Authors: Nitipon Puttaraksa, Mari Napari, Orapin Chienthavorn, Rattanaporn Norarat, Timo Sajavaara, Mikko Laitinen, Somsorn Singkarat, Harry J. Whitlow

Abstract: The lithographic exposure characteristic of amorphous silica (SiO2) was investigated for 6.8 MeV 16O3+...

Authors: Hao Dong Qiu, Hong Wang

Abstract: In this paper, studies on “quasi-static” region of ohmic-contact behavior for MEMS switches under low contact force and low current...

Authors: Rosminazuin A. Rahim, Badariah Bais, Majlis Burhanuddin Yeop

Abstract: In this paper, an isotropic dry plasma etching was used to release the suspended SiO2 microcantilever from the substrate of SOI...

Authors: Somsing Rathod, Atul Vir Singh, Sudhir Chandra, Shiban K. Koul

Abstract: In the present work we report design, simulation, fabrication and characterization of thin film bulk acoustic resonator (FBAR). The FBAR has...

Authors: Praveen Kumar Sampath, Muhamad Khairi Bin Safari, Lee Kian Ng, Ranganathan Nagarajan

Abstract: A novel two step etch process using the Bosch-etch mechanism to prevent notching on an SOI wafer is presented. The first etch step is used...


Abstract: Withdrawn at author request

Authors: Chih Hsin Shih, Daniel Yen

Abstract: In this study, mixing efficiencies of oscillating micromixers based on a compact disc under various operating conditions and geometric...


Showing 31 to 40 of 56 Paper Titles