NEMS/MEMS Technology and Devices, ICMAT2011

Volume 254

doi: 10.4028/

Paper Title Page

Authors: Chih Hsin Shih, Hou Jin Wu, Wen Hao Chen

Abstract: The stabilities of the burst frequencies of the capillary valves have a strong impact on the robustness of sequential flow controls on the...

Authors: Atul Vir Singh, Sudhir Chandra, Gouranga Bose

Abstract: In the present work, silicon carbide (SiC) films were deposited by RF magnetron sputtering process on Si (100) substrates for...

Authors: Subodh Srivastava, Sumit Kumar, Vipin Kumar Jain, Y.K. Vijay

Abstract: In the present work we have reported the effect of temperature on the gas sensing properties of pure Polyaniline (PANI) and Multiwall carbon...

Authors: Gandi Sugandi, Majlis Burhanuddin Yeop

Abstract: The advantages of micromachining over conventional fabrication include precise dimensional control, integration of on-chip circuits and...

Authors: Nadzril Sulaiman, Majlis Burhanuddin Yeop

Abstract: Magnetic field measurement has many applications particularly in the field of navigation, military, space exploration, and medical. Among...

Authors: Ling Ling Sun, Shan Zhong Wang, Ling Na Li, Jin Lan Guo, Siti Fatimatuzzahra Binti Roseli

Abstract: Micropumps represent one of the major components in microfluidic technology. This paper describes the fabrication and performance testing of...

Authors: Nobuyuki Suzuki, Hideyuki Homma, Shigeo Yamaguchi

Abstract: We have proposed and fabricated a NN-type Peltier device. The conventional Peltier devices have a structure called π-shaped, which is...

Authors: Ruchi Tiwari, Sudhir Chandra

Abstract: In the present work, we report the preparation, characterization and application of silicon nitride thin films deposited by RF magnetron...

Authors: Harikrishnan Narayanan Unni, Deny Hartono, Kian Meng Lim

Abstract: Dielectrophoresis has been shown to have significant potential for the characterization of cells and could become an efficient tool for...

Authors: Nan Wang, Fu Li Hsiao, Moorthi Palaniapan, Ming Lin Julius Tsai, Jeffrey B.W. Soon, Dim Lee Kwong, Cheng Kuo Lee

Abstract: Two-dimensional (2-D) Silicon phononic crystal (PnC) slab of a square array of cylindrical air holes in a 10μm thick free-standing silicon...


Showing 41 to 50 of 56 Paper Titles