Adhesion Promoter and Anti-Sticking Layer Effects on Adhesion Properties Using Symmetric AFM Probe


Article Preview

The reliable reproducibility of nano patterns or other nano structures is one of many issues in the nano-imprint lithography process. An important prerequisite for reproducibility is suitable adhesion properties of adhesion promoters or anti-sticking layer. In this study, rhombus shaped symmetrical probe with a flat tip was developed and fabricated using MEMS fabrication technique. For the experimental setup of the adhesion test using a UV curable PAK01 resin coated AFM tip with several adhesion promoters, the flat tip is covered by PAK01 resist using micromanipulator. Anti-sticking layers of silane agents were prepared on the tip by vapor deposition method. Adhesion force between various adhesion promoters (GPTS, APMDS, APTS, DUV30J, O2 planairzation) and PAK01 resist and the force between anti-sticking layer (FOTS, DDMS) and PAK01 resist were evaluated using the force-distance mode of AFM. Adhesion force of GPTS and FOTS are about 7180 nN and 1660 nN, respectively.



Advanced Materials Research (Volumes 26-28)

Edited by:

Young Won Chang, Nack J. Kim and Chong Soo Lee




H. J. Lee et al., "Adhesion Promoter and Anti-Sticking Layer Effects on Adhesion Properties Using Symmetric AFM Probe", Advanced Materials Research, Vols. 26-28, pp. 1113-1116, 2007

Online since:

October 2007




[1] E. S. Lee, J. H. Jeong, Y. S. Sim, K. D. Kim, D. G. Choi and J. H. Choi : Current Applied Physics 6S1 (2006), p. e92.

[2] M. Otto, M. Bender, F. Richter, B. Hadam, T. Kliem, R. Jede, B. Spangenberg and H. Kurz: Microoelectronic Engineering 73-74 (2004), p.152.

[3] M. Bender, A. Fuchs, U. Plachetka and H. Kurz : Microelectronic Engineering 83, (2006), p.827.

[4] W. S. Kim, J. H. Jin and B. S. Bae : Nanotechnology 17, (2006), p.1212.

[5] F. L. Leite and P. S. P. Herrmann : J. Adhesion Sci. Technol., 19, 3-5, (2005), p.365.

[6] H. J. Lee, K. Cho, J. H. Kim, Y. E. Yoo and J. M. Kim, C. W. Baek : Proceeding of 2005 KSME Fall Conference (2005).

[7] K. Cho, H. J. Lee, J.M. Kim and C.W. Baek : NanoKorea 2005, (2005), p.665.

[8] H.J. Lee, J.H. Kim, K. Cho, S.W. Han, J.Y. Lee, Y.E. Yoo, W.D. Kim and K.S. Kim : Proceeding of 2006 KSME Spring Conference (2006).