Terrace Formation of SrTiO3 (111) Substrates for Epitaxial Thin Film Growth with Various Etching Conditions

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The optimized terrace formation of SrTiO3 (111) substrates was investigated in various etching conditions. HCl-HNO3 solution was unstable for etching the SrTiO3 (111) substrates with different surface states. It was found that etching in buffered HF (BOE) solution for 2min provides a stable etching condition for SrTiO3 (111) substrates with various surface states and etching process is an important factor for the formation of step-terrace structures. The surface degradation of SrTiO3 (111) in normal atmosphere was also observed and it is considered that the humidity is a important factor for the surface degradation.

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Periodical:

Advanced Materials Research (Volumes 26-28)

Edited by:

Young Won Chang, Nack J. Kim and Chong Soo Lee

Pages:

1203-1206

Citation:

J. H. Suh et al., "Terrace Formation of SrTiO3 (111) Substrates for Epitaxial Thin Film Growth with Various Etching Conditions", Advanced Materials Research, Vols. 26-28, pp. 1203-1206, 2007

Online since:

October 2007

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$38.00

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