Terrace Formation of SrTiO3 (111) Substrates for Epitaxial Thin Film Growth with Various Etching Conditions


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The optimized terrace formation of SrTiO3 (111) substrates was investigated in various etching conditions. HCl-HNO3 solution was unstable for etching the SrTiO3 (111) substrates with different surface states. It was found that etching in buffered HF (BOE) solution for 2min provides a stable etching condition for SrTiO3 (111) substrates with various surface states and etching process is an important factor for the formation of step-terrace structures. The surface degradation of SrTiO3 (111) in normal atmosphere was also observed and it is considered that the humidity is a important factor for the surface degradation.



Advanced Materials Research (Volumes 26-28)

Edited by:

Young Won Chang, Nack J. Kim and Chong Soo Lee




J. H. Suh et al., "Terrace Formation of SrTiO3 (111) Substrates for Epitaxial Thin Film Growth with Various Etching Conditions", Advanced Materials Research, Vols. 26-28, pp. 1203-1206, 2007

Online since:

October 2007




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