Fabrication of OTFT Array with Coated Thin Film Dielectric and Printed Electrodes by Using Microcontact Printing
The gate, source, and drain electrodes of organic thin-film transistor(OTFT) to use as a switching device for a flexible display was fabricated in microcontact printing process with hard poly(dimethylsiloxane)(h-PDMS) stamp. The OTFT with thin-film dielectric layer of parylene-C(4300Å, 5000Å, 6500Å, 7500Å, and 9000Å) were formed using special coating system, and organic semiconductor layer was ink-jet printing process at room temperature. The microcontact printing process using self-assembled monolayer(SAM) and h-PDMS stamp made it possible to fabricate OTFT with channel length down to 600nm, fabricated thin film electrode of Au/Cr (100nm/5nm), and reduced the fabrication process by 20steps compared with photolithography process. Since the fabrication process was done in room temperature, there was no appeared such as pattern shrinkage, pattern transformation and bending problem.
Young Won Chang, Nack J. Kim and Chong Soo Lee
J. D. Jo et al., "Fabrication of OTFT Array with Coated Thin Film Dielectric and Printed Electrodes by Using Microcontact Printing", Advanced Materials Research, Vols. 26-28, pp. 661-664, 2007