For producing high-quality components through a nanoimprint lithographic (NIL) process, it is important to measure quantitative properties about the behavior of polymers with regard to thermal-nano variation. NanoScale indents can be used as cells for molecular electronics and drug delivery and slots for integration into nanodevices; they can be used to detect defects for tailoring the structure and properties. This study evaluates the mechanical characteristics of polymers, such as Polymethylmetacrylate (PMMA) and COP (Cyclo-olefin Polymer), at high temperatures for the manufacture of nano/micro-sized polymers through thermal nanoindentation at high temperatures. At high temperatures, the mechanical properties of polymers exhibit extreme variation. When a polymer is heated, it becomes softer than at room temperature. In this regard, it is especially important to study the mechanical properties of polymers at high temperatures.