Analysis of a New Magnetic Bearing for Magnetic Levitation Stages


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This paper proposed a new configuration of magnetic bearings used in magnetic levitation stages. The equivalent current sheet model is introduced to calculate the levitation force of the proposed magnetic bearing, and the experiment result validates the correctness of the calculation method. The relationships of structural parameters to the levitation force and axial stiffness are studied, which prove that the new magnetic bearing has larger levitation force with lower axial stiffness over the working stroke and could be applied in ultra-precision magnetic levitation stages.



Advanced Materials Research (Volumes 295-297)

Edited by:

Pengcheng Wang, Liqun Ai, Yungang Li, Xiaoming Sang and Jinglong Bu




Y. Zhu et al., "Analysis of a New Magnetic Bearing for Magnetic Levitation Stages", Advanced Materials Research, Vols. 295-297, pp. 2106-2111, 2011

Online since:

July 2011





[1] Choi Y. -M., Lee M. -G., and Gweon D. -G. et al: Rev. Sci. Instrum. Vol. 80(4) (2009): 045106.

[2] Kim K. -H., Choi Y. -M., and Gweon D. -G. et al, in: Design of decoupled dual servo stage with voice coil motor and linear motor for XY long stroke ultra-precision scanning system, Proc. SPIE Int. Soc. Opt. Eng., Vol. 6040 (2005).

DOI: 10.1117/12.664218

[3] Hol S.A.J.: Design and optimization of a magnetic gravity compensator, PhD thesis, Technische Universiteit Eindhoven, Netherlands (2004).

[4] Oome A.J.J.A. and Janssen J.L.G.: Sensors and Actuators, A: Physical, Vol. 153(2) (2009): 142-154.

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