Problems to evacuate chips will arise from manufacturing deep holes, especially for small diameters. Such problems induce frequent tool breakage and poor surface quality. The vibratory drilling enables the chip to be split into small elements thanks to the axial vibrations of the drill, self-maintained by the cutting energy. This research aims to improve breaking chip concerning high temperature alloy by vibraiont drilling as well as to establish a drilling technology. The development of breaking chip technology was presented. By the aid of the self-made vibrating drilling table, the axial vibration drilling was experimented on high temperature alloy with different parameter of vibration drilling. The breaking chip effect of vibration cutting was studied, and the axial drilling force and torque of vibration drilling were analyzed. The relation of each parameter and its effect on machining process was theoretically discussed. The experiment results show that vibration drilling is in favor of breaking chip, making the volume of chip small, and removing chips fluently, and the change of drilling force is relatively steady with some drilling parameters.